Hauptinhalt

Hunting the Picometer - Most Accurate Mirrors of the world

Gemeinsames Kolloquium des Fachbereichs Physik und des SFB 1083

Veranstaltungsdaten

Abstract:
The demand for smaller and more energy-efficient microchips is key for numerous technological advancements, from fast communication to autonomous driving.  To support this thirst for chips and to continue Moore's law, the ground-breaking developments of ZEISS optics play a key role. In this talk, an overview over the different generations of lithography optics of ZEISS is given. Applications and current developments are discussed. Insights into the challenges in production and  operation of optics for extreme ultraviolet (EUV) radiation are presented.

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